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Analysis of volatile organic compounds (VOCs) is essential for on-site environmental monitoring and toxic chemicals detection. However, quantitatively detecting VOC gases is difficult because of their low gas concentration ( less then 100 ppb), and preconcentration is necessary to overcome the detection limitations of various gas sensors. Many studies on micro preconcentrators (μ-PC) have been reported, however, these devices suffer from high desorption temperatures and significant pressure drops, which degrade sensing ability and increa